Preferential sputtering of compounds due to light ion bombardment
- 1 November 1982
- journal article
- Published by Elsevier in Journal of Nuclear Materials
- Vol. 111-112, 726-731
- https://doi.org/10.1016/0022-3115(82)90296-3
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
- Surface modifications due to preferential sputteringApplications of Surface Science, 1982
- TiC coatings on stainless steel, Inconel and Mo: Fabrication and testingJournal of Nuclear Materials, 1980
- Surface characterization of TiB2 coated on a molybdenum substrateJournal of Nuclear Materials, 1980
- A Monte Carlo computer program for the transport of energetic ions in amorphous targetsNuclear Instruments and Methods, 1980
- Mass and energy dependence of the equilibrium surface composition of sputtered tantalum oxideApplied Physics Letters, 1978
- Sputtering of PtSiJournal of Applied Physics, 1978
- First-wall coatings for Tokamak fusion reactorsThin Solid Films, 1977