Materials Analysis with High Energy Ion Beams Part I: Rutherford Backscattering
- 1 September 1987
- journal article
- Published by Springer Nature in MRS Bulletin
- Vol. 12 (6) , 26-29
- https://doi.org/10.1557/s088376940006718x
Abstract
This article discusses the underlying principles of Rutherford backscattering spectrometry (RBS). Consideration of the theory of the interaction of high energy ions with solids leads to the conclusion that quantitative elemental analysis of the near-surface composition of solids can be performed by RBS. Examples are given.Keywords
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