Linear capacitive microdisplacement transduction using phase read-out
- 31 December 1983
- journal article
- Published by Elsevier in Sensors and Actuators
- Vol. 3, 209-220
- https://doi.org/10.1016/0250-6874(82)80024-3
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- The design and some applications of sensitive capacitance micrometersJournal of Physics E: Scientific Instruments, 1973
- Microdisplacement transducersJournal of Physics E: Scientific Instruments, 1972
- Capacitive analog transducer of large displacementsMeasurement Techniques, 1968
- Capacitive displacement transducers with high accuracy and resolutionJournal of Physics E: Scientific Instruments, 1968