Residual Stress, Fracture, and Adhesion in Sputter-Deposited Molybdenum Films

This publication has 13 references indexed in Scilit:

• Technical note: Design and performance of a movable post-cathode magnetron sputtering system for making PBFA II accelerator ion sources
  Surface and Coatings Technology, 1987
• Nucleation and Growth of Stress Relief Patterns in Sputtered Molybdenum Films
  Japanese Journal of Applied Physics, 1986
• Microstructural and Chemical Components of Ceramic-Metal Interfacial Fracture Energies
  MRS Proceedings, 1986
• Decohesion of Thin Films From Ceramic Substrates
  MRS Proceedings, 1985
• Stress relief forms of diamond-like carbon thin films under internal compressive stress
  Thin Solid Films, 1984
• The embrittling effects of hydrogen on a variety of inorganic materials as indicated by acoustic emission
  Journal of Materials Science, 1979
• Use of Fracture Mechanics Concepts in Testing of Film Adhesion
  Published by ASTM International ,1978
• Thin-film Adhesion and Adhesive Failure—A Perspective
  Published by ASTM International ,1978
• Internal stresses in titanium, nickel, molybdenum, and tantalum films deposited by cylindrical magnetron sputtering
  Journal of Vacuum Science and Technology, 1977
• Stress Corrosion and Static Fatigue of Glass
  Journal of the American Ceramic Society, 1970