Complex heterogeneous equilibria in vapor phase crystal growth systems
- 30 June 1982
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 58 (1) , 273-278
- https://doi.org/10.1016/0022-0248(82)90236-6
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- The Incorporation of Phosphorus in Silicon Epitaxial Layer GrowthJournal of the Electrochemical Society, 1974
- Vapor Phase Equilibria in the Gallium-Chlorine and Gallium Arsenide-Chlorine SystemsJournal of the Electrochemical Society, 1965