Stability Of The Spectral Characteristics Of Ion Plated Interference Filters

27 February 1989

proceedings article
Published by SPIE-Intl Soc Optical Eng

p. 179-183
https://doi.org/10.1117/12.950035

Abstract

Ta205/Si02, Zr02/SiO2 and TiO2/SiO2 multilayer optical interference filters were deposited in a Balzers2BAP 800 coatiftg plant by reactive low-voltage ion plating. The spectral filter characteristics were investigated with respect to time and temperature. The observed stability is correlated to the water and hydrogen contents. The temperature derivatives of the refractive index of TiO2, ZrO2 and Ta205 were estimated.

Keywords

INTERFERENCE FILTERS
SILICA
WATER
ZIRCONIUM DIOXIDE
HYDROGEN
MULTILAYERS
PLATING
REFRACTIVE INDEX

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