Characteristics of fused silica as optical material for excimer laser beam. Effect of annealing in various atmosphares on the characteristics of absorption and emission bands induced by ArF excimer laser irradiation.
- 1 January 1991
- journal article
- Published by Laser Society of Japan in The Review of Laser Engineering
- Vol. 19 (2) , 177-184
- https://doi.org/10.2184/lsj.19.2_177
Abstract
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