Fabrication of superconducting YBa2Cu3O7−δ submicron structures

Publisher Website
Google Scholar
Abstract
Submicron structures of superconducting YBa2Cu3O7−δ (δ<0.1) are fabricated by high-energy electron-beam lithography in combination with Ar/O2 ion-beam etching. A novel three-level resist system of platinum/titanium/PMMA is developed to minimize the process-induced loss of superconductivity. Bridges as narrow as 150 nm with lengths between 0.3 and 4 μm have been fabricated, retaining their superconductivity without reloading with oxygen. Possible reasons for process-induced deterioration of superconducting properties are discussed.

This publication has 0 references indexed in Scilit: