CNx thin films obtained by laser induced CVD in different gas–substrate systems

This publication has 14 references indexed in Scilit:

• Characteristics of carbon nitride films synthesized by single-source ion beam enhanced deposition system
  Applied Physics Letters, 1996
• Is carbon nitride harder than diamond? No, but its girth increases when stretched (negative Poisson ratio)
  Chemical Physics Letters, 1995
• Growth of CN films by reactive ionized cluster beam deposition
  Journal of Crystal Growth, 1995
• Formation of the crystalline β-C3N4 phase by dual ion beam sputtering deposition
  Materials Letters, 1995
• IR and UV laser‐assisted deposition from titanium tetrachloride: A comparative study
  Advanced Materials for Optics and Electronics, 1995
• Carbon nitride formation by low-energy nitrogen implantation into graphite
  Thin Solid Films, 1994
• Formation of carbon nitride films on Si(100) substrates by electron cyclotron resonance plasma assisted vapor deposition
  Applied Physics Letters, 1994
• Nano-indentation studies of ultrahigh strength carbon nitride thin films
  Journal of Applied Physics, 1993
• Characterization of Chemical-Vapor-Deposited Amorphous-Silicon Films
  Japanese Journal of Applied Physics, 1993
• Structural properties and electronic structure of low-compressibility materials: β-${\mathrm{Si}}_3$${\mathrm{N}}_4$ and hypothetical β-${\mathrm{C}}_3$${\mathrm{N}}_4$
  Physical Review B, 1990