Fabrication of Fe-Zr-N Films with Very Low Coercivity

Abstract
Fe-Zr-N films with very low coercivity have been fabricated by RF magnetron sputtering. The films consist of very fine α Fe and ZrN crystals. The crystal size of α Fe is estimated to be less than 50 Å, resulting in decrease of the coercivity down to 10 A/m. The magnetic softness and thermal stability are available only for a very narrow range of nitrogen content.