Fabrication of Fe-Zr-N Films with Very Low Coercivity
- 1 February 1991
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 30 (2A) , L195
- https://doi.org/10.1143/jjap.30.l195
Abstract
Fe-Zr-N films with very low coercivity have been fabricated by RF magnetron sputtering. The films consist of very fine α Fe and ZrN crystals. The crystal size of α Fe is estimated to be less than 50 Å, resulting in decrease of the coercivity down to 10 A/m. The magnetic softness and thermal stability are available only for a very narrow range of nitrogen content.Keywords
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