Study of characteristics of the crystal temperature in a Czochralski puller through experiment and simulation
- 1 March 1993
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 128 (1-4) , 275-281
- https://doi.org/10.1016/0022-0248(93)90333-r
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- THERMAL HISTORY ANALYSIS OF A CZ CRYSTAL WITH LARGE DIAMETERPublished by Elsevier ,1991
- Global heat transfer model for Czochralski crystal growth based on diffuse-gray radiationJournal of Crystal Growth, 1990
- Effects of Thermal History on Microdefect Formation in Czochralski Silicon CrystalsJapanese Journal of Applied Physics, 1985