Polymer Electrooptic Waveguide Fabrication

• 11 August 1995
• book chapter
• Published by American Chemical Society (ACS)
• p. 420-435
• https://doi.org/10.1021/bk-1995-0601.ch031

Abstract

Keywords

• FABRICATION
• SILICON
• ETCHING
• POLYMER WAVEGUIDES
• ELECTROOPTIC
• OPTICAL
• STRUCTURES
• FIBER