Surface structures of InP and InAs thermally cleaned in an arsenic flux

• 1 May 1994
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 12  (3) , 2033-2036
• https://doi.org/10.1116/1.587697

Abstract

Keywords

• SURFACE STRUCTURES
• ARSENIC FLUX
• THERMALLY CLEANED
• INAS THERMALLY
• STRUCTURES OF INP