Plasma Etching of Poly[N,N'-(p,p'-Oxydiphenylene) Pyromellitimide] Film and Photo/Thermal Degradation of Etched and Unetched Film

Publisher Website

24 September 1979

book chapter
Published by American Chemical Society (ACS)

p. 299-314
https://doi.org/10.1021/bk-1979-0108.ch019

Abstract

No abstract available

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