Ion-implanted integrated optical waveguides in lithium niobate
- 1 January 1984
- journal article
- Published by Institution of Engineering and Technology (IET) in Radio and Electronic Engineer
- Vol. 54 (5) , 227-230
- https://doi.org/10.1049/ree.1984.0056
Abstract
The role of ion implantation in the fabrication of optical waveguides in lithium niobate is describedtogether with a review of work carried out in this field. In addition the waveguide structure and the process parameters which determine its characteristics are outlined. Finally, the implications of this technology forthe fabrication of more complex integrated optical devices are discussed.Keywords
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