Phosphorus liquid metal ion source using a Pt–P–Sb alloy

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Abstract
A phosphorus liquid metalion source using a Pt–P–Sb alloy has been newly developed. The ion emission characteristics such as mass‐separated ion intensity, energy spread, and long‐term beam stability are described. It is found that the P2+ flux has the highest intensity with respect to charged P ions and is mass separable with a low mass resolution of m/Δm≂2. The source lifetime of more than 200 h has been obtained. A fine scanning ion microscope image made with a 140‐keV P2+focused ion beam has shown considerable promise for maskless P ion implantation.
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