Damage to thin gate oxide during lightly doped drain spacer oxide etching

• 1 July 1994
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 12  (4) , 1334-1338
• https://doi.org/10.1116/1.579317

Abstract

Keywords

• DAMAGE
• THIN GATE
• LIGHTLY DOPED
• ETCHING
• SPACER
• DRAIN
• GATE OXIDE