Development of Energy-Filtered Reflection High-Energy Electron Diffraction Apparatus
- 1 October 1995
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 34 (10R)
- https://doi.org/10.1143/jjap.34.5869
Abstract
A new type of reflection high-energy electron diffraction (RHEED) apparatus equipped with an energy filter has been developed. The apparatus can exclude the inelastically scattered electrons from the RHEED pattern for the first time. Performance of the apparatus is demonstrated using a Si(001)2×1 surface. The energy-filtered RHEED (EF-RHEED) can extract valuable information from the background. Furthermore, it can be used to measure energy loss spectra of diffraction spots.Keywords
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