A SiGe HBT BiCMOS technology for mixed signal RF applications

Abstract
We present results of IBM's Silicon Germanium HBT 0.35 /spl mu/m L/sub eff/ BiCMOS process with 3 level metal on 200 mm wafers. CMOS devices, as well as resistors, capacitors, inductors and other key passive elements are integrated into a high performance SiGe HBT NPN technology without sacrificing key bipolar characteristics (f/sub t/, f/sub max/). These results demonstrate the potential of designing analog/mixed signal applications with "system-on-a-chip" functionality.

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