Laser Micromachining of a Modified PbTiO3 Ceramics in KOH Water Solution
- 1 January 1983
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 22 (S2)
- https://doi.org/10.7567/jjaps.22s2.109
Abstract
The Ar+ laser-enhanced chemical etching of a modified PbTiO3 ceramics is studied. It is shown that 10 mol/lKOH water solution is the best etchant for the ceramics, giving excellent appearances and edge definitions for hole and slot machining. The depth etch rate is as high as 150 µm/s for the hole machining in the first one second irradiation at 1 W output at 514.5 nm wavelength. It is postulated the main etching mechanism is not direct melting, dissolving or vaporizing of the ceramics but removing of the ceramic grains one after another.Keywords
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