Low-temperature silicon wafer bonding
- 1 April 1992
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 32 (1-3) , 340-344
- https://doi.org/10.1016/0924-4247(92)80009-r
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Fusing silicon wafers with low melting temperature glassSensors and Actuators A: Physical, 1990
- Bonding of silicon wafers for silicon-on-insulatorJournal of Applied Physics, 1988
- Field Assisted Glass-Metal SealingJournal of Applied Physics, 1969