Infrared spectroscopic ellipsometry:a tool for characterizing nanometer layers†
- 1 January 1998
- journal article
- research article
- Published by Royal Society of Chemistry (RSC) in The Analyst
- Vol. 123 (4) , 647-651
- https://doi.org/10.1039/a707112d
Abstract
An overview of applications of infrared spectrometric ellipsometry for characterizing samples which consist of a metal, semiconductor or organic layer on a variety of substrates is given. The thicknesses addressed cover the entire nanometer range. Both anisotropy and inhomogeneity of the layers are considered.Keywords
This publication has 0 references indexed in Scilit: