Silicon accelerometer with new thermal self-test mechanism

Publisher Website

2 January 2003

proceedings article
Published by Institute of Electrical and Electronics Engineers (IEEE)

p. 122-125
https://doi.org/10.1109/solsen.1992.228310

Abstract

No abstract available

This publication has 2 references indexed in Scilit:

A monolithic silicon accelerometer with integral air damping and overrange protection
Published by Institute of Electrical and Electronics Engineers (IEEE) ,2003
Accelerometer systems with built-in testing
Sensors and Actuators A: Physical, 1990