Purification of SiCl[sub 4] by Adsorption Techniques

• 1 January 1960
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 107  (1) , 29
• https://doi.org/10.1149/1.2427603

Abstract

Keywords

• ADSORPTION TECHNIQUES
• PURIFICATION OF SICL
• SUB