Abstract
A brief review on surface structural studies with He and Ne atom beam diffraction is presented. It is shown that for scattering from clean and hydrogen-covered metal surfaces with Ne, systematically larger corrugation amplitudes are obtained so that charge density contours closer to the surface atom cores are scanned. This leads to an enhanced sensitivity towards details of atomic arrangements at surfaces and sometimes surface bonding aspects can also be revealed. Most importantly, however, Ne seems to give more faithful pictures of surface atomic arrangements than He, probably due to larger influences of anticorrugating effects in He-metal surface interactions.

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