Scanning acoustic interference microscope with wedge delay line
- 2 February 1984
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 20 (3) , 113-115
- https://doi.org/10.1049/el:19840077
Abstract
The variable acoustic delay line employing a wedge can be successfully introduced to accomplish a novel interference microscope. This interference microscope can be easily established only by substituting a wedge for the specimen mount in the conventional scanning acoustic microscope. The acoustic velocity of as-sputtered ZnO film is measured with this microscope at a frequency of 150 MHz. The acoustic velocity of a longitudinal wave along the c-axis in the ZnO film is determined to be 6.3 km/s.Keywords
This publication has 1 reference indexed in Scilit:
- Scanning Acoustic Microscope with Transducer Swing Along Beam AxisPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1982