Surface Roughness Assessment Of Ultrasmooth Laser Mirrors And Substrates
- 28 November 1983
- proceedings article
- Published by SPIE-Intl Soc Optical Eng
- p. 266-279
- https://doi.org/10.1117/12.935527
Abstract
The surface roughness of ultrasmooth laser mirror coatings and substrates can be assessed in various ways: mechanically, optically and electron-optically. In this paper, a selection of useful methods like stylus measurements, optical heterodyne profilometry, light scattering measurements and electron mirror interference microscopy is presented. Results obtained with these methods at various laboratories from our inhouse superpolished optical flats are given. Some problems of comparing the results from the different methods are addressed and aspects of the practical utility of the methods discussed.Keywords
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