Production of stable and metastable phases of zirconium nitrides by NH3 plasma nitridation and by double ion beam sputtering of zirconium films
- 1 March 2000
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 125 (1-3) , 100-105
- https://doi.org/10.1016/s0257-8972(99)00607-6
Abstract
No abstract availableKeywords
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