Step bunching and step equalization on vicinal GaAs(001) surfaces

• 1 July 1994
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 12  (4) , 2689-2693
• https://doi.org/10.1116/1.587232

Abstract

Keywords

• BUNCHING AND STEP
• STEP EQUALIZATION
• VICINAL GAAS
• SURFACES
• EQUALIZATION ON VICINAL