Reactive magnetron sputtering of ZnO
- 1 July 1981
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 52 (7) , 4772-4774
- https://doi.org/10.1063/1.329315
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- Characterization of ZnO piezoelectric films prepared by rf planar-magnetron sputteringJournal of Applied Physics, 1980
- Broadband efficient thin-film Sezawa wave interdigital transducersApplied Physics Letters, 1980
- Structure and properties of vacuum-deposited thin films: A new basic relationshipJournal of Applied Physics, 1977