UHF Composite Bulk Wave Resonators

• 1 January 1980
• conference paper
• Published by Institute of Electrical and Electronics Engineers (IEEE)
• p. 834-837
• https://doi.org/10.1109/ultsym.1980.197515

Abstract

Keywords

• BIOMEMBRANES
• SUBSTRATES
• ACOUSTIC WAVES
• FABRICATION
• RESONANCE
• PIEZOELECTRIC FILMS
• MICROELECTRONICS
• ZINC OXIDE
• RESONANT FREQUENCY
• SURFACE ACOUSTIC WAVE DEVICES