Formation of AlN films by ion plating.

• 1 January 1987
• journal article
• Published by The Vacuum Society of Japan in SHINKU
• Vol. 30  (5) , 477-480
• https://doi.org/10.3131/jvsj.30.477

Abstract

Keywords

• ALN FILMS
• FORMATION OF ALN
• FILMS BY ION PLATING