Accurate calibration of gold film standards by neutron activation and gravimetry

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Abstract
A set of evaporated gold films on silicon substrates has been prepared for use as standards in the measurement of film thickness by Rutherford backscattering. The mass of gold in the films was determined independently by gravimetry and by instrumental neutron activation. The area was measured with an optical comparator; film uniformity was assayed by backscattering. Systematic errors in the single-element comparator method of activation analysis have been assessed and either eliminated or compensated, with the result that the single-sample agreement in mass between the two methods was 0.3% and the mean relative bias was below the random errors, also 0.3%.