Phosphorus diffusion effect on off-current of a-Si thin film transistors

This publication has 4 references indexed in Scilit:

• Defect model of charge transfer doping at a-SiNx:H/a-Si:H interfaces
  Journal of Non-Crystalline Solids, 1985
• The characteristics and properties of optimised amorphous silicon field effect transistors
  Applied Physics A, 1983
• (Invited) Silicon TFTs for Flat Panel Displays
  Japanese Journal of Applied Physics, 1983
• Substitutional doping of amorphous silicon
  Solid State Communications, 1975