Optimization of an electron-bombardment ion source for ion machining applications
- 1 November 1975
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science and Technology
- Vol. 12 (6) , 1344-1347
- https://doi.org/10.1116/1.568535
Abstract
A new 10-cm-diameter ion source has been designed specifically for ion machining applications. This source employs technology and experience from the development of ion engines for electron space propulsion and generates a highly uniform beam of 500-eV Ar+ at current densities exceeding 2 mA/cm2.Keywords
This publication has 0 references indexed in Scilit: