Operation and device applications of a valved-phosphorus cracker in solid-source molecular-beam epitaxy
- 1 March 1995
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 13 (2) , 750-753
- https://doi.org/10.1116/1.588154
Abstract
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