Computer controlled ESCA for nondestructive surface characterization utilizing a TV-type position sensitive detector
- 1 June 1978
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 49 (6) , 756-759
- https://doi.org/10.1063/1.1135607
Abstract
A position sensitive detector system composed of a channel plate, a vidicon TV camera, and a computer is utilized for multichannel detection of ESCA spectra. It is demonstrated that the system achieves a marked improvement of measurement speed, S/N ratio, and sensitivity. The system also realized an improvement of spatial resolution while retaining energy resolution.Keywords
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