H^+ lithography for 3-D integration of optical circuits
- 10 September 1990
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 29 (26) , 3723-3724
- https://doi.org/10.1364/ao.29.003723
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.Keywords
This publication has 3 references indexed in Scilit:
- Planar integration of free-space optical componentsApplied Optics, 1989
- Diffractive–reflective optical interconnectsApplied Optics, 1988
- Integrated Optics: An IntroductionBell System Technical Journal, 1969