A Comparative Study of Spin‐On and Chemical Vapor Deposited Teflon Amorphous Fluoropolymer Thin Films
- 1 August 1997
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 144 (8) , 2924-2928
- https://doi.org/10.1149/1.1837919
Abstract
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