Use of the Talystep in investigating diffraction grating groove profiles
- 1 December 1973
- journal article
- Published by IOP Publishing in Journal of Physics E: Scientific Instruments
- Vol. 6 (12) , 1199-1201
- https://doi.org/10.1088/0022-3735/6/12/019
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- An investigation of the shape and dimensions of some diamond styliJournal of Physics E: Scientific Instruments, 1970
- Observation and measurement of surface relief of diffraction gratings using electron microscopy techniquesJournal of Physics E: Scientific Instruments, 1969
- Nouveau procédé d'observation du profil et de l'état des surfaces par microscopie électronique; applications à l'optiqueApplied Optics, 1969
- Electron Microscope Method for Measuring Diffraction Grating Groove GeometryApplied Optics, 1965