A Simple Ion Gun
- 1 September 1971
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 42 (9) , 1348-1350
- https://doi.org/10.1063/1.1685382
Abstract
A simple electron bombardment ion gun based on a Bayard-Alpert ion gauge is described. The gun produces a total beam current of about 1 μA of Ar+ with a current density of 1 to 5 μA/cm2 and a diameter of about 1 cm, at an argon pressure of 5×10−6 Torr. The energy half-width of the beam is about 10 eV for ion energies between 500 and 1500 eV. The source is suitable for the production of ions from any gas.Keywords
This publication has 4 references indexed in Scilit:
- High Intensity, Low Energy Spread Ion Source for Chemical AcceleratorsReview of Scientific Instruments, 1969
- Electron Bombardment Ion Source for Low Energy BeamsReview of Scientific Instruments, 1968
- Electron Impact Ionization Cross-Section Data for Atoms, Atomic Ions, and Diatomic Molecules: I. Experimental DataReviews of Modern Physics, 1966
- A Mass Spectrometer for Isotope and Gas AnalysisReview of Scientific Instruments, 1947