Study on the sensing mechanism of tin oxide flammable gas sensors using the Hall effect
- 15 June 1991
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 69 (12) , 8368-8374
- https://doi.org/10.1063/1.347400
Abstract
Measurements were made on the Hall effect of SnO2 thin-film inflammable gas sensors prepared by using the reactive sputtering method. The results revealed that when the electrical conductivity of the sensors changed with a change in the flammable gas concentration in air, the apparent carrier density changed significantly while apparent mobility hardly changed at all. However, detailed analysis revealed that these experimental results could not be explained by using the double Schottky model or the neck model that had been proposed. In order to provide satisfactory explanation of the experimental results, the authors clarified that for SnO2 thin films there exists no distinction between bulk and surface of the grain while the carrier densities of bulk and surface of the grain simultaneously change with a change in oxygen absorption of the SnO2 surface in the presence of flammable gas. This model was in good agreement with the results of transmission electron microscopy observations.This publication has 12 references indexed in Scilit:
- Sensing mechanism of SnO2 gas sensorsJournal of Materials Science, 1990
- Dynamic Properties of SnO2 Semiconductor Gas Sensors Sensing of Hydrogen Contained in AirJournal of the Electrochemical Society, 1989
- 酸化錫半導体ガスセンサー上のH2-O2反応の解析Denki Kagaku oyobi Kogyo Butsuri Kagaku, 1989
- 酸化錫半導体ガスセンサーの温度・湿度依存性の検討Denki Kagaku oyobi Kogyo Butsuri Kagaku, 1989
- 酸化錫薄膜のガス感度特性Denki Kagaku oyobi Kogyo Butsuri Kagaku, 1988
- Gas-sensing characteristics of tin oxide whiskers with different morphologiesSensors and Actuators, 1988
- ホール効果を用いた酸化錫半導体ガスセンサーの湿度依存性についての検討Denki Kagaku oyobi Kogyo Butsuri Kagaku, 1988
- 酸化錫半導体ガスセンサーのホール効果測定Denki Kagaku oyobi Kogyo Butsuri Kagaku, 1988
- Selectivity in semiconductor gas sensorsSensors and Actuators, 1987
- Hall measurement studies and an electrical conduction model of tin oxide ultrafine particle filmsJournal of Applied Physics, 1982