Influence of Beam and Target Properties on the Excimer Laser Deposition of Yba₂Cu₃O_7−x Thin Films

1 January 1990

journal article
Published by Springer Nature in MRS Proceedings

Vol. 191
https://doi.org/10.1557/proc-191-205

Abstract

Target modification by excimer laser exposure has been investigated. Under conditions typical in the fabrication of superconducting thin films, deposition rate decreases with exposure and significant physical and chemical modifications occur on the target surface. These modifications do not inhibit congruent evaporation.

Keywords

This publication has 5 references indexed in Scilit:

Nature Of Pulsed Laser Deposition Technique And In-Situ Processing Of YBa 2 Cu 3 O 7 Superconducting Thin Films
Published by SPIE-Intl Soc Optical Eng ,1990
Effects of beam parameters on excimer laser deposition of YBa2Cu3O7−δ
Applied Physics Letters, 1990
Surface compositional and topographical changes resulting from excimer laser impacting on YBa2Cu3O7 single phase superconductors
Applied Physics Letters, 1988
Growth of thin films by laser-induced evaporation
Critical Reviews in Solid State and Materials Sciences, 1988
Laser-Beam Interactions with Materials
Published by Springer Nature ,1987

Influence of Beam and Target Properties on the Excimer Laser Deposition of Yba2Cu3O7−x Thin Films

Abstract

Keywords

Influence of Beam and Target Properties on the Excimer Laser Deposition of Yba₂Cu₃O_7−x Thin Films