Correction of differential capacitance profiles for Debye-length effects
- 1 December 1980
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 27 (12) , 2262-2267
- https://doi.org/10.1109/t-ed.1980.20262
Abstract
Conventional differential capacitance-voltage (C-V) profiling methods are limited in resolution by the method used to convertC-Vdata to profile data. A new method of numerical calculation ofC-Vdata, using cubic finite elements, is presented which allows a more exact relationship betweenC-Vdata and profile data to be calculated. This new method of data reduction allows the resolution of differentialC-Vprofiling method to be extended to dimensions near the local extrinsic Debye length.Keywords
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