Progress in monitoring thin film thickness by use of quartz crystals
- 1 July 1989
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 174, 307-314
- https://doi.org/10.1016/0040-6090(89)90907-3
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
- Improved quartz crystal microbalance techniqueJournal of Applied Physics, 1984
- Mass determination with piezoelectric quartz crystal resonatorsJournal of Vacuum Science and Technology, 1975
- Linearity of a Heavily Loaded Quartz Crystal MicrobalanceJournal of Vacuum Science and Technology, 1973
- Investigation of film-thickness determination by oscillating quartz resonators with large mass loadJournal of Applied Physics, 1972
- Long-Term Operation of Crystal Oscillators in Thin-Film DepositionJournal of Vacuum Science and Technology, 1971
- Acoustic Wave Analysis of the Operation of Quartz-Crystal Film-Thickness MonitorsJournal of Applied Physics, 1968
- Sensitivity Enhancement by the Use of Acoustic Resonators in cw Ultrasonic SpectroscopyJournal of Applied Physics, 1968
- Verwendung von Schwingquarzen zur W gung d nner Schichten und zur Mikrow gungThe European Physical Journal A, 1959