Low Temperature Silicon Thermometer and Bolometer
- 1 April 1970
- journal article
- conference paper
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 41 (4) , 547-549
- https://doi.org/10.1063/1.1684573
Abstract
By simple diffusion and etching procedures low temperature sensitive surface layers can be prepared on otherwise insulating silicon substrates. Temperature coefficients of the resistance of these layers of the order of unity can be obtained at any temperatures below 20 K. The usefulness of this silicon device as a low temperature thermometer and bolometer is demonstrated.Keywords
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