An efficient numerical technique for electrochemical simulation of complicated microelectromechanical structures
- 1 January 1997
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 58 (1) , 1-11
- https://doi.org/10.1016/s0924-4247(97)80218-x
Abstract
No abstract availableKeywords
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