Modification to enhance the beam current of a simple ion gun
- 1 March 1976
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 47 (3) , 299-300
- https://doi.org/10.1063/1.1134607
Abstract
An ion gun has been modified to operate in a continuously pumped mode, in which gas is leaked directly into the ionization region, and the vacuum system is pumped to ∼10−7 Torr Ar by a helium cryopump. A milling rate of 3.8 Å/sec was obtained for SiO2 using 2 keV Ar ions. Sample to gun distance was 5 cm. This may be compared with the rate 0.8 Å/sec, obtained when operating in a static vacuum of 5×10−5 Torr Ar.Keywords
This publication has 1 reference indexed in Scilit:
- Use of Auger Electron Spectroscopy and Inert Gas Sputtering for Obtaining Chemical ProfilesJournal of Vacuum Science and Technology, 1972