Stacking Faults from Oxide Precipitates in CZ Silicon

• 1 January 1979
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 18  (S1)
• https://doi.org/10.7567/jjaps.18s1.179

Abstract

Keywords

• STACKING FAULTS
• CZ SILICON
• OXIDE PRECIPITATES
• FAULTS FROM OXIDE
• PRECIPITATES IN CZ