Graphite formation in diamond film deposition

• 1 May 1989
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 7  (3) , 2315-2324
• https://doi.org/10.1116/1.575935

Abstract

Keywords

• GRAPHITE FORMATION
• FORMATION IN DIAMOND
• DIAMOND FILM DEPOSITION